Fabrication and performance of a silicon micromachined hydrophone
نویسندگان
چکیده
منابع مشابه
Capacitively Sensed Micromachined Hydrophone with Viscous Fluid-Structure Coupling
This work presents a novel design for a micromachined, capacitively sensed hydrophone. The design consists of a fluid-filled chamber constrained by two sets of membranes. The “input” membranes are arrayed around the outside of the circular chamber. Incoming sound generates a trapped cylindrical wave, creating mechanically amplified motion of the 1 mm diameter central “sensing” membrane. The mem...
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ژورنال
عنوان ژورنال: The Journal of the Acoustical Society of America
سال: 1992
ISSN: 0001-4966
DOI: 10.1121/1.404917